• Control of Manufacturing Processes (SMA 6303)
  • 授课教师: Prof. David Hardt;Prof. Duane Boning
  • 授课机构:Massachusetts Institute of Technology(MIT)
  • 课程层次:研究生
  • 课程时间:Spring 2008
  • 授课语言:English
  • 课程地址:
课程简介 教师简介

  This course explores statistical modeling and control in manufacturing processes. Topics include the use of experimental design and response surface modeling to understand manufacturing process physics, as well as defect and parametric yield modeling and optimization. Various forms of process control, including statistical process control, run by run and adaptive control, and real-time feedback control, are covered. Application contexts include semiconductor manufacturing, conventional metal and polymer processing, and emerging micro-nano manufacturing processes.